Micro-structure of obliquely evaporated Co-CoO film is investigated by using high resolution transmission electron microscope (TEM) and fast Fourier transform (FFT) technique. Power spectrum image, corresponding to diffraction pattern, is obtained by FFT for TEM image. Lattice images of Co (002) and CoO (111) are reconstructed by inverse FFT for selected Fourier transformed data. It is found that the Co-CoO film contains very small Co particles from 4 to 6 nm in diameter.
