Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Processing Techniques
SURFACE MORPHOLOGY OF GARNET FILMS DEPOSITED BY METALLO-ORGANIC
Chung-Hee ChangMark H. Kryder
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JOURNAL OPEN ACCESS

1996 Volume 20 Issue S_1_MORIS_96 Pages S1_357-360

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Abstract

  The depaendence of surface motphology of thin film garnets deposited by metallo-organic decomposition (MOD) on process conditions was investigated in an effort to produce MOD garnets with small roughness. The surface morphology of sputtered films were also studied for comparison. The surface morphologies were studied by atomic force microscopy (AFM) and cross-sectional electron microscopy. It was found that the surface morphology of the MOD films was very sensitive to film deposition conditions such as the number of layers, spincoating speed, heat treatment conditions, and the condition of the organic solution. It was also found that the MOD garnets were inherently rough due to a significant volume change which occurs during the drying and decomposition process. The smoothest MOD film showed mean roughness of order of 5 nm at 150 nm thickness while the roughness of the sputtered film was order of 0.5 nm.

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© 1996 by The Magnetics Society of Japan
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