1998 年 22 巻 S_1_ISFA_97 号 p. S1_120-122
Ba ferrite films composed of microcrystallites with well c-axis orientation which seem to be suitable for perpendicular magnetic recording media were deposited using various sputtering apparatus and their microstructural and magnetic characteristics were investigated. The bombardment of energetic particles to the film during deposition and the elevation of substrate temperature strongly affected the growth prcess of Ba ferrite crystallites and the increase of perpendicular coercivity. The films deposited using Facing Targets Sputtering apparatus at the substrate temperature as low as 475°C revealed that they were composed of nanocrystallites with the grain size below 100 nm and exhibited the coercivity of as high as 2.3 kOe.
