1998 年 22 巻 S_1_ISFA_97 号 p. S1_147-149
The BixDy3-xFe4AlO12 thin films (where x=0∼1.96) were prepared by laser ablation with XeCl laser (λ=308 nm) on the Corning #7059 glass substrates. Single-phase BixDy3-xFe4AlO12 thin films were fabricated by controlling the O2 pressure and substrate temperature during deposition then annealed at 650°C. The effects of deposition parameters and heat-treatment condition on the structure and magnetic properties of films were investigated. In addition, the relationships between the perpendicular magnetic properties of the films and thickness of the films were examined. From XRD analysis, we found that these BixDy3-xFe4AlO12 films were polycrystalline garnet and no preferred orientation. VSM measurement showed that the perpendicular coercivity of the Bi1.58Dy1.42Fe4.04Al0.96O12 film (thickness=100nm) was about 1130 Oe. The magnetic anisotropy of this film was normal to the film plane. This anisotropy was stress induced. The MO-Loop measurement showed that Faraday rotation angle of this film was 0.3 deg/μm for λ=780nm.