スパッタ Fe₇₀Co₃₀二元合金膜における軟磁気特性の膜厚依存性

抄録

Fe₇₀Co₃₀ single-layer films with various thicknesses were deposited on glass substrates by RF sputtering. We investigated the dependence of magnetic properties and film structure on the film thickness. Fe-Co films with thicknesses of less than 50 nm show isotropic magnetic properties. Increasing the Fe-Co film thickness brings about uniaxial magnetic anisotropy and low coercive force. Frequency dependence of initial permeability for the 770-nm-thick Fe-Co film is markedly different from the theoretical one, because of magnetic anisotropy dispersion. With an increase in the Fe-Co film thickness, the crystal orientation changes and the I(211)/I(110) intensity ratio becomes stronger. These structural features may be related to the appearance of uniaxial magnetic anisotropy and low coercive force.