Giant magnetostrictive material (GMM) has large magnetostriction, and has been successfully used in many actuators and sensors. Currently, practical microactuators and micro-sensors are widely anticipated in the industry. In this study, the effect of adding Co to Tb-Fe GMM thin film and the influence of heat-treatment were examined. GMM thin film was used in a force sensor. GMM thin film with a Co ratio of 25.5 at% and annealing temperature of 300°C has 1200 ppm magnetostriction at 80 kA/m. The characteristics of a force sensor using a GMM thin film with a relative permeability of 210 are also examined.
