2006 年 30 巻 6_1 号 p. 531-534
This paper discusses the basic performance of a soft magnetic film as the RF electromagnetic noise suppressor and its application to a LSI chip. The 1.0μm-thick soft magnetic CoNbZr film has been integrated onto a bare LSI chip by RF sputtering method. Magnetic field above the chip has been evaluated by a planar shielded-loop probe from 1 to 2 GHz. The maximum suppression observed was 37.8 dB at 1.12 GHz.