反応スパッタ Fe₃O₄ 膜の結晶配向性と磁気特性

抄録

Magnetite (Fe₃O₄) thin films were prepared by RF reactive sputtering in an argon-oxygen mixed atmosphere. RF power density and total gas pressure, which affect the kinetic energy of sputtered atoms, were held constant. [111] preferential orientation of Fe₃O₄ films was improved by an increase of gas flow rate and a decrease of intermittent deposition rate.
Squareness ratio (M_r/M_s) increased and coercive force (H_c) decreased with an improvement in the preferential orientation for these films.