Possible Health Hazards Associated with the Use of Toxic Metals in Semiconductor Industries

Swaran J.S. FLORA

doi:10.1539/joh.42.105

著者情報

キーワード: Gallium arsenide, Indium arsenide, Indium phosphide, Metal distribution, Biochemical changes, Experimental evidence, Chelation treatment

ジャーナルフリー

2000 年 42 巻 3 号 p. 105-110

DOI https://doi.org/10.1539/joh.42.105

詳細

Published: 2000 Received: 1999/08/17 Available on J-STAGE: 2006/04/07 Accepted: 2000/01/08 Advance online publication: - Revised: -
訂正情報
訂正日: 2006/04/07 訂正理由: - 訂正箇所: 引用文献情報訂正内容: Wrong : 1) Robinson AL. GaAs readied for high-speed microcircuit. Science 1983; 219: 275-277.
2) Fowler BA. Toxic metals in emerging technologies. In Metal Toxicology, edited by RA Goyer, CD Klaassen. MP Waalkes, Academic Press, NY, 1985: 187-196.
3) Flora SJS, Gupta SD. Effects of single exposure to gallium arsenide on some biochemical variables in porphyrin metabolism in rats. J Appl Toxicol 1992; 12:333-334.
4) Flora SJS, Gupta SD. Toxicology of gallium arsenide: an appraisal. Def Sci J 1994; 44: 5-10.
5) Goering PL, Maronpot RR, Fowler BA. Effect of intratracheal gallium arsenide administration on - aminolevulinic acid dehydratase in rats: relationship to urinary excretion of aminolevulinic acid. Toxicol Appl Pharmacol 1988; 92: 179-193.
6) Yamamuchi H, Takahashi K, Yamamura Y, Fowler BA. Metabolism of subcutaneous administered indium arsenide in the hamster. Toxicol Appl Pharmacol 1992; 116: 66-70.
7) Carter DE, Sullivan JB. Intermetallic semiconductor and inorganic hydrides. In: Hazardous Materials Toxicology, Clinical Principles of Environment, Sullivan JB, Kreiger GR, eds. Williams & Wilkins, MD, USA, 1992: 916-921.
8) Conner EA, Yamamuchi H, Fowler BA. Alterations in the heme biosynthetic pathway from the III-V semiconductor metal, indium arsenide (InAs). Chem Biol Interact 1995; 96: 273-285.
9) Webb DR, Sipes IG, Carter DE. In vitro solubility and in vivo toxicity of gallium arsenide. Toxicol Appl Pharmacol 1984-,76: 96-104.
10) Yamamuchi H, Takahashi K, Yamamura Y. Metabolism and excretion of orally and intraperitoneally administred gallium arsenide in the hamsters. Toxicology 1986; 40: 237-246.
11) Zheng W, Winter SM, Kattnig MJ, Carter DE, Sipes IG. Tissue distribution and elimination of indium in male Fischer 344 rats following oral and intratracheal administration of indium phosphide. J Toxicol Environ Health 1994; 43: 483-494.
12) Webb DR, Wilson SE, Carter DE. Comparative pulmonary toxicity of gallium arsenide, gallium (III) oxide or arsenic (III) oxide intratracheally instilled into rats. Toxicol Appl Pharmacol 1986; 82: 405-416.
13) Ohyama S, Ishinishi N, Hisangawa A, Yamamoto A. Comparative chronic toxicity including tumorigenicity of gallium arsenide and arsenic trioxide intratracheally instilled into hamsters. Appl Organomet Chem 1988; 2: 233-237.
14) Kabe I, Omae K, Nakashima H, et al. In vitro solubility and in vivo toxicity of indium phosphide. J Occup Health 1996; 38: 6-12.
15) Tanaka A, Hisanaga A, Hirata M, Omura M, Makita Y, Inoue N, Ishinishi N. Chronic toxicity of indium arsenide and indium phosphide to the lungs of hamsters. Fukuoka Igaku Zasshi 1996; 87: 105-115.
16) Uemura T, Oda K, Omae K, et al. Effects of intratracheally administered indium phosphide on male Fischer 344 rats. J Occup Health 1997; 39: 205-2 10.
17) Oda K. Toxicity of a low level of indium phosphide (InP) in rats after intratracheal instillation. Indust Health 1997; 35: 61-68.
18) Flora SJS, Dube SN, Vijayaraghvan R, Pant SC. Changes in certain hematological and physiological variables following single gallium arsenide exposure in rats. Biol. Trace Elem Res 1997; 58: 197-208.
19) Flora SJS, Kumar P, Kannan GM, Rai GP. Acute oral gallium arsenide exposure and changes in certain hematological, hepatic, renal and immunological indices at different time intervals in male wistar rats. Toxicol Letters 1999; 94: 103-113.
20) Sikorski EE, McCay JA, White KL, Bradley SG, Munson AE. Immunotoxicity of the semiconductor gallium arsenide in female B6C3FI mice. Fund Appl Toxicol 1989; 13: 843-858.
21) Sikorski EE, Burns LA, McCay KL, Stern M, Munson AE. Suppression of splenic accessory cell function in mice exposed to gallium arsenide. Toxicol Appl Pharmacol 1991; 110: 143-156.
22) Sikorski EE, Burns LA, Stern ML, Luster MI, Munson AE. Splenic cell target in gallium arsenide induced suppression of the primary antibody response. Toxicol Appl Pharmcol 1991; 110: 129-142.
23) Burns LA, Sikorski EE, Saady JJ, Munson AE. Evidence for arsenic as the immunosuppressive component of gallium arsenide. Toxicol Appl Pharmacol 1991; 110: 157-169.
24) Burns LA, Munson AE. Reversal of gallium arsenide induced suppression of the in vitro generated antibody response by supernatants from vehicle exposed cultures I. pharmacokinetic following in vitro and in vivo exposure. J Pharmacol Exp Ther 1993; 265: 144-149.
25) Ladou J. Health issues in the global semiconductor industry. Ramazini Ann 1992; 3: 110-112.
26) Omura M, Tanaka A, Zhao M, Hirata M, Makita Y, Inoue N, Gotoh K. Toxic effects of gallium arsenide on sperm in rats by repeated intratracheal instillations. J Occup Health 1995; 37: 165-166.
27) Omura M, Tanaka A, Zhao M, Hirata M, Makita Y, Inoue N, Ishinishi N. Testicular toxicity of gallium arsenide, indium arsenide and arsenic oxide in rats by repetitive intratracheal institllation Fund Appl Toxicol 1996;32:72-78.
28) Omura M, Hirata M, Tanaka A, et al. Testicular toxicity evaluation of arsenic containing binary compound semiconductor semiconductor, gallium arsenide and indium arsenide in hamsters. Toxicol Lett 1996; 89: 123-129.
29) Conner EA, Yamamuchi H, Fowler BA, Akkarman M. Biological indicators for monitoring exposure/toxicity from III-V semiconductors J Exp Anal Environ Epidemiol 1993; 314: 431-440.
30) Conner EA. Control methods for metals and metalloids in III-V materials vapor phase epitaxy. In: Proceedings of the Conference on Hazards Assessment and Control Technology in Semiconductor Manufacturing. American Council of Government Industrial Hygieniest; Lewis, Chelsea MI: 1989; 243-258.
31) Flora SJS. Alterations in some hepatic biochemical variables following repeated gallium arsenide administration in rats. Int Hepatol Comm 1996; 5: 97-103.
32) Fowler BA. Indium. In: Friberg L, Nordberg GF, Vouk VB, eds. Handbook on the toxicology of metals. 2nd edition, Amsterdam; Elsevier, 1986: 939-944.
33) Fowler BA, Wood JS. The effects of prolonged oral arsenate exposure on liver mitochondria of mice: Morphometric and biochemical studies. Toxicol Appl Pharmacol 1979; 50: 177-187.
34) Flora SJS, Dube SN, Pant SC, Sachan AS. Effect of multiple gallium arsenide exposure on some biochemical alterations in rat brain. Ind Health 1994; 32:247-252.
35) Yamamuchi H, Takahashi K, Mashiko M, Yamamura Y. Biological monitoring of arsenic exposure of gallium arsenide and inorganic arsenic exposed workers by determination of inorganic arsenic and its metabolites in urine and hair. Am Ind Hyg Assoc J 1989; 50: 606-612.
36) Hammond PB, Bieliles RP, Klaassen CD, Amdur MO, Doull J. In: Klaassen CD, Amdur MO, Doull J, eds. Toxicology: The Basic Science of Poisons. NY: MacMillan Publishing Co, 1986.
37) Burns LA, Butterworth LF, Munson AE. Reversal of gallium arsenide-induced suppression of the antibody response by a mixed disulfide metabolite of meso 2,3 dimercaptosuccinic acid. J Pharmacol Exp Ther 1993; 264:695-700.
38) Flora SJS, Kumar P. Biochemical and immunotoxicological alterations following repeated gallium arsenide exposure and their recoveries by meso 2,3-dimercaptosuccinic acid and 2,3 dimercaptopropane 1-sulfonate administration in rats. Environ Toxicol Pharmacol 1996; 2: 315-320.
39) Flora SJS, Kannan GM, Kumar P. Selenium effects on gallium arsenide induced biochemical and immunotoxicological changes in rats. Chem Biol Interact 1999; 122: 1-13.
40) Flora SJS. Arsenic induced oxidative stress and its reversibility following combined administration of N-acetyl cysteine and meso 2,3-dimercaptosuccinic acid in rats. Clin Exp Pharmacol Physiol 1999; 26: 865-869.

Right : 1) Robinson AL. GaAs readied for high-speed microcircuit. Science 1983; 219: 275-277.
2) Fowler BA. Toxic metals in emerging technologies. In Metal Toxicology, edited by RA Goyer, CD Klaassen. MP Waalkes, Academic Press, NY, 1985: 187-196.
3) Flora SJS, Gupta SD. Effects of single exposure to gallium arsenide on some biochemical variables in porphyrin metabolism in rats. J Appl Toxicol 1992; 12:333-334.
4) Flora SJS, Gupta SD. Toxicology of gallium arsenide: an appraisal. Def Sci J 1994; 44: 5-10.
5) Goering PL, Maronpot RR, Fowler BA. Effect of intratracheal gallium arsenide administration on - aminolevulinic acid dehydratase in rats: relationship to urinary excretion of aminolevulinic acid. Toxicol Appl Pharmacol 1988; 92: 179-193.
6) Yamamuchi H, Takahashi K, Yamamura Y, Fowler BA. Metabolism of subcutaneous administered indium arsenide in the hamster. Toxicol Appl Pharmacol 1992; 116: 66-70.
7) Carter DE, Sullivan JB. Intermetallic semiconductor and inorganic hydrides. In: Hazardous Materials Toxicology, Clinical Principles of Environment, Sullivan JB, Kreiger GR, eds. Williams & Wilkins, MD, USA, 1992: 916-921.
8) Conner EA, Yamamuchi H, Fowler BA. Alterations in the heme biosynthetic pathway from the III-V semiconductor metal, indium arsenide (InAs). Chem Biol Interact 1995; 96: 273-285.
9) Webb DR, Sipes IG, Carter DE. In vitro solubility and in vivo toxicity of gallium arsenide. Toxicol Appl Pharmacol 1984-,76: 96-104.
10) Yamamuchi H, Takahashi K, Yamamura Y. Metabolism and excretion of orally and intraperitoneally administred gallium arsenide in the hamsters. Toxicology 1986; 40: 237-246.
11) Zheng W, Winter SM, Kattnig MJ, Carter DE, Sipes IG. Tissue distribution and elimination of indium in male Fischer 344 rats following oral and intratracheal administration of indium phosphide. J Toxicol Environ Health 1994; 43: 483-494.
12) Webb DR, Wilson SE, Carter DE. Comparative pulmonary toxicity of gallium arsenide, gallium (III) oxide or arsenic (III) oxide intratracheally instilled into rats. Toxicol Appl Pharmacol 1986; 82: 405-416.
13) Ohyama S, Ishinishi N, Hisangawa A, Yamamoto A. Comparative chronic toxicity including tumorigenicity of gallium arsenide and arsenic trioxide intratracheally instilled into hamsters. Appl Organomet Chem 1988; 2: 233-237.
14) Kabe I, Omae K, Nakashima H, et al. In vitro solubility and in vivo toxicity of indium phosphide. J Occup Health 1996; 38: 6-12.
15) Tanaka A, Hisanaga A, Hirata M, Omura M, Makita Y, Inoue N, Ishinishi N. Chronic toxicity of indium arsenide and indium phosphide to the lungs of hamsters. Fukuoka Igaku Zasshi 1996; 87: 105-115.
16) Uemura T, Oda K, Omae K, et al. Effects of intratracheally administered indium phosphide on male Fischer 344 rats. J Occup Health 1997; 39: 205-2 10.
17) Oda K. Toxicity of a low level of indium phosphide (InP) in rats after intratracheal instillation. Indust Health 1997; 35: 61-68.
18) Flora SJS, Dube SN, Vijayaraghvan R, Pant SC. Changes in certain hematological and physiological variables following single gallium arsenide exposure in rats. Biol. Trace Elem Res 1997; 58: 197-208.
19) Flora SJS, Kumar P, Kannan GM, Rai GP. Acute oral gallium arsenide exposure and changes in certain hematological, hepatic, renal and immunological indices at different time intervals in male wistar rats. Toxicol Letters 1999; 94: 103-113.
20) Sikorski EE, McCay JA, White KL, Bradley SG, Munson AE. Immunotoxicity of the semiconductor gallium arsenide in female B6C3FI mice. Fund Appl Toxicol 1989; 13: 843-858.
21) Sikorski EE, Burns LA, McCay KL, Stern M, Munson AE. Suppression of splenic accessory cell function in mice exposed to gallium arsenide. Toxicol Appl Pharmacol 1991; 110: 143-156.
22) Sikorski EE, Burns LA, Stern ML, Luster MI, Munson AE. Splenic cell target in gallium arsenide induced suppression of the primary antibody response. Toxicol Appl Pharmcol 1991; 110: 129-142.
23) Burns LA, Sikorski EE, Saady JJ, Munson AE. Evidence for arsenic as the immunosuppressive component of gallium arsenide. Toxicol Appl Pharmacol 1991; 110: 157-169.
24) Burns LA, Munson AE. Reversal of gallium arsenide induced suppression of the in vitro generated antibody response by supernatants from vehicle exposed cultures I. pharmacokinetic following in vitro and in vivo exposure. J Pharmacol Exp Ther 1993; 265: 144-149.
25) Ladou J. Health issues in the global semiconductor industry. Ramazini Ann 1992; 3: 110-112.
26) Omura M, Tanaka A, Zhao M, Hirata M, Makita Y, Inoue N, Gotoh K. Toxic effects of gallium arsenide on sperm in rats by repeated intratracheal instillations. J Occup Health 1995; 37: 165-166.
27) Omura M, Tanaka A, Zhao M, Hirata M, Makita Y, Inoue N, Ishinishi N. Testicular toxicity of gallium arsenide, indium arsenide and arsenic oxide in rats by repetitive intratracheal institllation Fund Appl Toxicol 1996;32:72-78.
28) Omura M, Hirata M, Tanaka A, et al. Testicular toxicity evaluation of arsenic containing binary compound semiconductor semiconductor, gallium arsenide and indium arsenide in hamsters. Toxicol Lett 1996; 89: 123-129.
29) Conner EA, Yamamuchi H, Fowler BA, Akkarman M. Biological indicators for monitoring exposure/toxicity from III-V semiconductors J Exp Anal Environ Epidemiol 1993; 314: 431-440.
30) Conner EA. Control methods for metals and metalloids in III-V materials vapor phase epitaxy. In: Proceedings of the Conference on Hazards Assessment and Control Technology in Semiconductor Manufacturing. American Council of Government Industrial Hygieniest; Lewis, Chelsea MI: 1989; 243-258.
31) Flora SJS. Alterations in some hepatic biochemical variables following repeated gallium arsenide administration in rats. Int Hepatol Comm 1996; 5: 97-103.
32) Fowler BA. Indium. In: Friberg L, Nordberg GF, Vouk VB, eds. Handbook on the toxicology of metals. 2nd edition, Amsterdam; Elsevier, 1986: 939-944.
33) Fowler BA, Wood JS. The effects of prolonged oral arsenate exposure on liver mitochondria of mice: Morphometric and biochemical studies. Toxicol Appl Pharmacol 1979; 50: 177-187.
34) Flora SJS, Dube SN, Pant SC, Sachan AS. Effect of multiple gallium arsenide exposure on some biochemical alterations in rat brain. Ind Health 1994; 32:247-252.
35) Yamamuchi H, Takahashi K, Mashiko M, Yamamura Y. Biological monitoring of arsenic exposure of gallium arsenide and inorganic arsenic exposed workers by determination of inorganic arsenic and its metabolites in urine and hair. Am Ind Hyg Assoc J 1989; 50: 606-612.
36) Hammond PB, Bieliles RP, Klaassen CD, Amdur MO, Doull J. In: Klaassen CD, Amdur MO, Doull J, eds. Toxicology: The Basic Science of Poisons. NY: MacMillan Publishing Co, 1986.
37) Burns LA, Butterworth LF, Munson AE. Reversal of gallium arsenide-induced suppression of the antibody response by a mixed disulfide metabolite of meso 2,3 dimercaptosuccinic acid. J Pharmacol Exp Ther 1993; 264:695-700.
38) Flora SJS, Kumar P. Biochemical and immunotoxicological alterations following repeated gallium arsenide exposure and their recoveries by meso 2,3-dimercaptosuccinic acid and 2,3 dimercaptopropane 1-sulfonate administration in rats. Environ Toxicol Pharmacol 1996; 2: 315-320.
39) Flora SJS, Kannan GM, Kumar P. Selenium effects on gallium arsenide induced biochemical and immunotoxicological changes in rats. Chem Biol Interact 1999; 122: 1-13.
40) Flora SJS. Arsenic induced oxidative stress and its reversibility following combined administration of N-acetyl cysteine and meso 2,3-dimercaptosuccinic acid in rats. Clin Exp Pharmacol Physiol 1999; 26: 865-869.

訂正日: 2006/04/07 訂正理由: - 訂正箇所: PDFファイル訂正内容: -

抄録

Possible Health Hazards Associated with the Use of Toxic Metals in Semiconductor Industries: Swaran J.S. FLORA. Division of Pharmacology and Toxicology, Defence Research and Development Establishment, Gwalior, India—Gallium Arsenide (GaAs), Indium Arsenide (InAs) and Indium Phosphide (InP) are the intermetallic compounds that are recognised as a potential health risk to workers occupationally exposed to their dust. Exposure to these semiconductor compounds in the microelectronic industry can occur during the preparation of material, cleaning and maintenance operations for quartz glassware and during cleaning of the reactor. The toxic effect of the intermetallic semiconductors appears to occur due to inhalation or oral exposure and may result in poisoning. Assessment of risk to workers engaged in GaAs/InAs production is difficult due to the lack of data on the toxicity of these compounds. Their toxicity is mainly estimated on the basis of inorganic arsenic because it is now well known that GaAs and InAs dissociate into their constitute moieties and exert adverse effects on the haematopoietic and immune systems. As their toxicity is still not very well understood the treatment also remains to be elucidated.

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