Abstract
The optimum configuration of the rectangular waveguide type device is given for producing a stable high power microwave plasma. It is shown that helical flow of nitrogen gas stabilizes the plasma beam and contributes to the formation of a virtual “gas wall” between the plasma beam and the pyrex wall. It is clarified that the change in the pyrex tube diameter strongly affects the plasma parameters and the comparison of experimental results with a theory of energy absorption by Meierovich shows a better agreement by assuming the existence of a “gas wall”.