2015 年 33 巻 9 号 p. 696-703
The ultrasonic motor is an actuator that has advantages such as low speed, high torque (good response time), and high positioning accuracy. In this paper, we analitically compare the responsiveness of the ultrasonic motors with the electromagnetic motors using those exercise equation. From the simulation results, a good responsiveness of the ultrasonic motors is clarified in step and frequency responses, when the output torque of both motors are same and a load is smaller than the max angular acceleration of both motors becomes same. Another focus of this paper is that a high-speed camera with high-power lens visualizes how the ellitilcal motion changes. By using the high speed microscope, we examine the relationship between the change of the elliptical motion and the motor responsiveness analytically and experimentally.