エクステンディド・アブストラクト
An Improved Backscattering Correction Equation for Wide Analytical Conditions on Quantitative Auger Analysis
2009 年 15 巻 3 号 p. 312-316
詳細
2009 年 15 巻 3 号 p. 312-316
We have described the electron backscattering correction for Auger analysis. Ichimura-Shimizu equation has been frequently used for this correction, but has limitations for incident electron energies and angles. Then, we have proposed an improved correction for the backscattering correction that could be applied to the wide analytical conditions based on the Ichimura-Shimizu equation.
