The 61st JSAP Spring Meeting 2014
Session ID : 17a-PG3-9
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
61
Location :
[in Japanese]
Date :
March 17, 2014 - March 20, 2014
Identification of Leak Point in SiC Devices Using High Sensitivity IR Thermograph