The 75th JSAP Autumn Meeting 2014
Session ID : 17a-PB4-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Fabrication of Overdoze of hydrogen to a-Si:H Film by “Ion Beam Assist Method”
*Kazuki Miyama, junpei Fukashi, seiya Matsukawa, Hiroshi Kubota, Masao Yoshioka, Souitirou Ootsu
Author information
Details
Article 1st page
