The 62nd JSAP Spring Meeting 2015
Session ID : 14a-A24-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Design of High-k and Interfacial Layer on Germanium for 0.5 nm EOT
Details
Article 1st page
