The 64th JSAP Spring Meeting 2017
Session ID : 17a-313-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Fluorocarbon radical behavior of synchronized dc-imposed pulsed plasmas for advanced dielectric etching processes
*Toshinari Ueyama, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Manabu Iwata, Yoshinobu Ohya
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