The 80th JSAP Autumn Meeting 2019
Session ID : 20p-E310-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Improvement of surface flatness using H2 etching in N-polar AlN
*Ryota Sakamoto, Tatuya Isono, Tadatoshi Ito, Kazuya Ataka, Hiroshi Kawamura, Narihito Okada, Kazuyuki Tadatomo
Author information
Keywords:
20p-E310-3,
AlN
Details
Article 1st page
