JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 19a-E308-1
Conference information

Sheet-Resistance Reduction of Sputtered-MoS2 Film by SF6 Plasma Treatment
*Taiga HoriguchiTakuya HamadaTetsuya TatsumiShigetaka TomiyaTakuya HoshiiKuniyuki KakushimaKazuo TsutsuiHitoshi Wakabayashi
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Article 1st page
Content from these authors
© 2019 The Japan Society of Applied Physics
Previous article Next article
feedback
Top