The 67th JSAP Spring Meeting 2020
Session ID : 14p-A305-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
On-site Si2H6 gas generation from solid Si by hydrogen plasma
*Keiichi Hamanaka, Taniguchi Daisuke, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
Author information
Details
Article 1st page
