JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 16a-Z23-2
Conference information

Characterizations of B-doped BaSi2 films formed by sputtering
*Hayato HasebeTaira NemotoRyota KoitabashiMasami MesudaKaoru TokoTakashi Suemasu
Author information
Keywords: 16a-Z23-2, BaSi2, sputtering
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Article 1st page
Content from these authors
© 2021 The Japan Society of Applied Physics
Previous article Next article
feedback
Top