The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-N105-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Infrared bolometric detection at room temperature using MEMS beam resonators
*Tianye Niu, Natalia Morais, Boqi Qiu, Naomi Nagai, Ya Zhang, Yasuhiko Arakawa, Kazuhiko Hirakawa
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