Paper
Manipulation of fine objects by probes of the electrostatic chuck type
2006 年 18 巻 1+2 号 p. 86-89
詳細
2006 年 18 巻 1+2 号 p. 86-89
Particle assemblage by probe manipulation is a built-up process to fabricate microstructures. We investigated the probe manipulation method featured by applying voltages to the probe to control the adhesion force. Two types of probe are fabricated. One is a monopole probe and the other is a dipole probe. The former is composed of a needle-like metal wire, and the voltage is applied between the probe and the external electrode like a metal substrate. The latter is composed of a needle-like electrode and a stainless tube arranged concentrically. The tip of the monopole probe was shaped hemispherically by insulating resin. The monopole probe can catch fine particles of 10 μm to 100 μm on the metal substrate, while the monopole probe can catch both conductive particles and dielectric particles without the restriction of substrates. The particles jump up to the tip of the probe and adhere. The features of the two probes are compared.
