Letter
水素吸蔵合金薄膜と超磁歪合金薄膜を用いた複合運動機能素子の開発
2006 年 18 巻 3+4 号 p. 175-178
詳細
2006 年 18 巻 3+4 号 p. 175-178
A composite mover device constructed with both hydrogen storage and giant magnetostrictive alloy thin films on each side surface of polyimide substrate were prepared by flash vacuum evaporation and DC magnetoron sputtering process, respectively. Although the composite mover device was about 750ppm before hydrogenation, it was about 1150ppm after hydrogenation. The hydrogenation induced strain was approximately corresponded to that of magnetized sample.
