画像記録のためのBi12GeO20膜の構造評価
Kenji ISSHIN, Hayato NAGASE, Hiroshi MUROTANI, Takehisa SHIBUYA, Moriaki WAKAKI, Hidetoshi KATSUMA
著者情報
2001 年 13 巻 1-2 号 p. 82-83
詳細
2001 年 13 巻 1-2 号 p. 82-83
The photorefractive single crystal bulk samples have been used for image recording. Films of Bi12GeO20 (BGO) were deposited by using RF magnetron sputtering. Thin films have merits in device integration and mass production. BGO films were fabricated on the substrates composed of glasses (CORNING 7059) and ITO films. The relationship between optical properties and process condition was studied to obtain a good crystalline film. The film with crystalline phase only was obtained on both substrates at the substrate temperatures above 200°C. BGO films with two type of structure were deposited on ITO films.
