試料表面測定のためのSTM用三次元探査微動装置の作成
1996 年 8 巻 1-2 号 p. 93-94
詳細
1996 年 8 巻 1-2 号 p. 93-94
We fabricated the three dimensional slight probe movement system for scanning tunneling microscope (STM), The scanner used the piezoelectric tube, We measured the hysterical expansion for the piezo tube and a convection value of the control system for scanner.
