Abstract
In this study, we studied on a high sensitive triaxial force sensor for blood pressure pulse wave measurement. Our sensor consists of 3 cantilevers for sensing xyz directional force which were embedded in PDMS (Polydimethylsiloxane) with hollow structure. The size of the sensor is 18×18×10 mm3. Since the cavity of PDMS structure enlarges the deformation, the sensitivity becomes higher. The sensitivity was 15.15 mV/kPa and it was about 4.4 times higher than the conventional sensor. We measured blood pressure pulse wave and calculated the SNR (Signal to Noise Ratio) of blood pressure pulse wave. The SNR was 4.56 and it was improved by 18 % compared to the conventional sensor.
