Dynamic Analysis of the X-shaped Groove Aerostatic Bearings with Disk-Spring Compensator

Abstract

This paper describes the development of the modified resistance network method (RNM) for analyzing the dynamic behaviors of X-shaped grooves aerostatic bearing with a passive disk-spring compensator. The Newmark integration method and the modified RNM, which takes into account on the equilibrium of the mass flow rate and the squeeze film effect, are used to analyze the time-dependent dynamic behaviors. Results show that after impulse most of the vibrations are absorbed by the disk-spring compensator and the table can maintain a small vibration around the equilibrium position.