2003 Volume 46 Issue 4 Pages 1598-1603
In this research, the manufacturing processes of aspherical refraction microlens array by gray-scale mask if investigated. In the first part of this research, we emphasize on the gray-scale mask based microlens array fabrication processes through the UV-LIGA approach. Furthermore, a two-stage process-modeling scheme is proposed to reduce the time-consuming trail-and-error parameters tuning labor works. Experimental results demonstrate that the proposed approach can well model the fabrication process and is capable of providing effective fabrication parameters once the diameter and height of a certain microlens is provided.
JSME international journal. Ser. 1, Solid mechanics, strength of materials
JSME international journal. Ser. A, Mechanics and material engineering
JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry
JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing
JSME International Journal Series A Solid Mechanics and Material Engineering
JSME International Journal Series B Fluids and Thermal Engineering