Abstract
In this study, a new low-invasive micro sensor is developed to detect compliance of a single cell by using dynamic response of piezoelectric vibrator. The bending mode of vibration, excited by piezoelectric ceramics, is utilized in a small beam type vibrator. This sensor can also enforce dynamic stimulations as the micro actuator. The actuator-sensor was controlled by micromanipulator system, while dimensions and morphologies of a minute cell were measured by inverted phase contract microscope system. The experimental results have shown capabilities as a micro sensor to detect mechanical properties of a human osteoblast, which are stimulated dynamically by the micro actuator.