Abstract
In this study, a new non-invasive micro sensor system is developed to detect compliance of minute living cells and tissues by using dynamic response of piezoelectric vibrator. 3-D micro actuator is also developed to enforce dynamic stimulations. The sensor was controlled by micromanipulator system, while dimensions and morphologies of the cells were measured by inverted phase contract microscope system. The method has shown that the reaction of living cells might have frequency dependence against vibrating stimulations by the actuator. Also, experimental studies have shown that dynamic stimulations accelerate damage recovery of minute living cells.