Abstract
This paper deals with modeling and vibration control of an isolation system which has a lightweight isolation table. If loading structures are set up on a largescale-lightweight isolation table, three-dimensional coupled vibration modes are generated between the isolation table and the loading structures. In this paper, "modeling method for elastic body with arbitrary boundary conditions by using Extended Reduced Order Physical Model" is applied to obtain a dynamical model that can describe three dimensional vibrations of elastic structure. The vibration controller for the isolation system is obtained by using this model with the LQ control theory. Moreover, simple modeling procedure of Extended Model for the isolation table is presented.
