E 型鉄心を用いたベアリングレスリニアスライダの開発

―FEM 解析による実現性の検討―

抄録

General conveying device have many problems such as metal powder occurred by abrasion and lubrication oil. Magnetic levitation linear sider has solved the problems and has used in semiconductor factory. It consists of actuator device and levitation device, and they are functioned with separate electromagnets. E-shaped iron cores are used in magnetic levitation systems and linear motors. In this linear slider, magnetic flux that produces thrust force and levitation force are mutually shared in E-shaped iron core like a bearingless motor. Electromagnet unit is designed by FEM analysis and check thrust force, levitation force and piching torque. In addition, it is checked experimentally that two functions can be organization.