抄録
This research proposes a new Nano-scale cutting method. The self-excited vibration cutting method,
could cut more efficiently than the forced vibration cutting method has been discussed. In the proposed
method, the linear feedback control causes the self-excited vibration in microcantilever used as the cutting
tool. It could avoid the problem noticed in the experiments that the microcantilever could not keep in the
resonate state during the cutting based on the forced vibration. By analyzing and contrasting experimental
results with forced vibration and self-excited vibration cutting methods, it has been demonstrated the
cutting product is improved efficiently with the self-excited vibration cutting method. The microcantilever can be resonated regardless of which the natural frequency of the microcantilever would change during cutting. Furthermore, under the self-excited vibration by linear feedback control, this research has brought out the amplitude change of the microcantilever in air and contact condition, respectively.
