Abstract
In this paper, we propose a novel microfabrication technique without assembling process including alignment and bonding for 3-D micro-molds in microfludics. The proposed process can integrate microchannels with free path, orifices, and openings by using the inclined/rotated UV lithography with a characteristic single-mask of whole image exposure in a short period of time. In order to confirm the validity of the proposed fabrication process, we fabricated a micro-electroporation device with two flow channel to introduce cell and substance suspension, six orifices to fix the cell, two inlets and one outlet by using single-mask multidirectional photolithography. The immobilization efficiency of cells were investigated in the fabricated devices.
