曲面上の微小欠陥の自動光学検査

抄録

We have developed a method to visualize micro-defects on curved surfaces using an imaging system to obtain a color mapping of light directions reflected from the surfaces. Furthermore, we constructed an image processing algorithm for automatic detection of these micro-defects. In this paper, it is shown that the method has the capability to automatically detect micro-defects on curved surfaces with depths ranging from 0.1 μm to several tens of μm.