The Proceedings of Conference of Kanto Branch
Online ISSN : 2424-2691
ISSN-L : 2424-2691
2021.27
Session ID : 10A03
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Nodule deformation of PVA roller brushes and its existence ratio near the surface
*Atsuki HOSAKAYuki MIZUSHIMASatomi HAMADARyota KOSHINOAkira FUKUNAGAToshiyuki SANADA
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Abstract

PVA brushes are widely used for semiconductor device manufacturing. The brushes can be removed nano-sized particles so that the brushes behavior near a contacting surface is important. In this study, the existence ratio near surface and deformation of the roller type brushes were experimentally observed by high-speed photography. A convex lens and evanescent fields were utilized for the definition of the depth of the observation. As a result, the reduction of the existence ratio by starting the brush rotation was observed. We also found the large compression of a nodule at the time of contact was observed compared with the simple pressing. This result suggests that the removal of nano-sized particles carried out noncontact condition, i.e., fluid absorption and desorption due to the volume change of nodules.

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© 2021 The Japan Society of Mechanical Engineers
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