Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 10, 2021 - March 11, 2021
PVA brushes are widely used for semiconductor device manufacturing. The brushes can be removed nano-sized particles so that the brushes behavior near a contacting surface is important. In this study, the existence ratio near surface and deformation of the roller type brushes were experimentally observed by high-speed photography. A convex lens and evanescent fields were utilized for the definition of the depth of the observation. As a result, the reduction of the existence ratio by starting the brush rotation was observed. We also found the large compression of a nodule at the time of contact was observed compared with the simple pressing. This result suggests that the removal of nano-sized particles carried out noncontact condition, i.e., fluid absorption and desorption due to the volume change of nodules.