Fine pattern fabrication on a 3D surface using fast tool servo for milling process

抄録

Demand for fabricating microstructures on a workpiece surface has increased in recent years. A fast tool servo technology has been proposed as one of the technologies for fabricating fine patterns with high efficiency. This study has focused on milling process using a fast tool servo with a giant magnetostrictive element as an actuator. This paper describes the performance evaluation of the system by machining experiments of fine patterns. The results confirmed that fine patterns can be fabricated on a 3D surface by using the developed fast tool servo system.