Various Industry and Precise Measurement : (12)Precision Measuring on Microelectoronic Components

Journal of the Society of Mechanical Engineers

Online ISSN : 2424-2675
ISSN-L : 0021-4728

Various Industry and Precise Measurement : (12)Precision Measuring on Microelectoronic Components

Hidehiko NISHIO, Masao SUZUKI

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1966 Volume 69 Issue 566 Pages 356-360

DOI https://doi.org/10.1299/jsmemag.69.566_356

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© 1966 The Japan Society of Mechanical Engineers

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