The Proceedings of the Machine Design and Tribology Division meeting in JSME
Online ISSN : 2424-3051
2014.14
Session ID : 2307
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2307 Nano-level measurement of cylindrical surfaces by scanning laser interferometry with wide field of view
Isami NITTA, Shunsuke SAKUMA, Yosuke TSUKIYAMA
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Keywords: laser interferometry, laser scanning, cylindrical surface, nano measurement, wide field of view
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© 2014 The Japan Society of Mechanical Engineers
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