Development of high wear resistance ta-CNx and examination of the mechanism

Abstract

CNx (carbon nitride) coating is an attractive material due to low friction coefficient. However, our previous research reported that the wear resistance of CNx deposited by IBA-ED (Ion Beam Assisted－Electron beam Deposition) was insufficient. In order to overcome this problem, we deposited CNx with higher hardness and non-droplet using IBA-FAD (Ion Beam Assisted－Filtered Arc Deposition), and this film showed high wear resistance. We termed the new CNx as ta-CNx (tetrahedral amorphous－Carbon Nitride). More interestingly, ta-CNx showed higher wear resistance with higher N/C ratio regardless of hardness decreasing. Here we show the mechanical and the fictional properties of ta-CNx.