Abstract
Mechanical characterization of micro-/nano-scaIed materials using MEMS devices is of great interest because of the high sensitivity in their force and displacement measurements and the size compatibility in assembling a specimen. In this article, a comb-drive fan-shaped resonator for ultra-high cycle fatigue test of single crystal silicon, an electrostatic tensile testing device for polymerized fullerene nano wires, and a thermal actuator based tensile testing device for SWCNT are presented.
