抄録
Last few decades, many researchers have experimented with micro-scale compression or tension test, and have reported that the plastic behavior of crystalline materials with small dimensions is different from that of bulk. For designing microsystems, it is very important to understand deformation mechanism of nano- and micro- scale materials, and to evaluate mechanical property of it. A few previous researches help us to comprehend the dislocation motion under uniform stress field which dominates the plastic behavior of material. However, dislocation motion under the non-uniform stress field, i.e. actual stress conditions for microsystems, should be more complicated than that under the uniform stress field. In this paper, a spring specimen was fabricated by focused ion beam so that we can observe dislocation motion under the transmission electron microscopy to understand plastic deformation mechanism under the non-uniform stress field. The fabricated specimen was subjected to the torsion test by nanoindenter under the scanning electron microscopy. And then, we confirmed that primary slip plane activated in locally deformed part.
