無機-有機ハイブリッドヘテロ界面を用いた振動発電

抄録

A sacrificial water-soluble BaO layer was employed to fabricate free-standing single-crystalline BaTiO₃ membranes and prepare the inorganic-organic hybrid heterointerface for vibrational energy harvesting applications. An epitaxial BaTiO₃/SrTiO₃/BaO heterostructure was deposited on a SrTiO₃(001) substrate by pulsed laser deposition. The sacrificial BaO layer was dissolved by immersing the heterostructure into water. An epitaxial inorganic BaTiO₃ membrane was released from the SrTiO₃ (001) substrate and transferred onto a glass or polyethylene terephthalate (PET) substrate coated with an organic polydimethylsiloxane (PDMS) adhesion layer. A 200 nm-thick BaTiO₃ membrane was sandwiched between two flexible PDMS/ITO/PET electrode layers, forming a vibrational energy harvester test device that could operate at an average electrical power output of over 2 μW.