抄録
This paper proposes an aerostatic porous thrust bearing with a deep feed groove. This bearing can supply pressurized air from a stational guide way to a moving table without any disturbances of air supply tubes as a conventional aerostatic surface-compensated bearing. However, the optimum bearing clearance for the maximum stiffness in this bearing is 2μm but it is often expected to set the optimum bearing clearance at around 5μm. In this paper, the improvement method of bearing stiffness by inserting an orifice restrictor into an air feed line is investigated theoretically and experimentally. It is found that this method is effective in increasing the static stiffness of this type of the bearings.
