T0101-1-1 Numerical Simulation for Nano/Micro-Imprinting of Glass

Abstract

In the present paper, some experiments and numerical simulations about nano imprinting of glass devices using finite element method are investigated. Thermo-viscoelastic properties of the glass materials were estimated using undirectional compression creep test based on traditional thermoviscoelastic theory. In this study, D263 were used as glass materials. Glass nano imprinting was carried out with Glassy Carbon mold given to groove patterns machined by focused ion beam (FIB). The adaptive condition of molding temperature which given appropriate transcription profile of the glass was investigated. Moreover, numerical simulation for nano imprinting of the glass was carreid out by finite element method using universal FEM code (ANSYS ver.11.0). As a result of comparing experimental results with numerical ones, the transcription of height of groove obtained by experiment approximately agree with numerical value when the friction coefficient were 0.4 or more.