WS-01 SCIENCE IN MEMS : A PLENTY OF ROOM FOR MULTIDISCIPLINARY RESEARCH(For a construction of future technology-From "micro-nano" to "intelligence"-,Workshop)

抄録

Textbooks and common sense still have to be rewritten in MEMS areas, because knowledge is not matured in micro/nano science. Examples are presented in wet etching of silicon and fracture of silicon microstructures. It is argued that interdisciplinary research collaboration is quite effective and essential for solving such problems.