Abstract
High-cycle fatigue experiment is carried out for a nano-components specimen, which is composed of silicon (Si) substrate, copper (Cu) nano-film, and silicon nitride (SiN) layer, using resonant oscillation. The specimen has a cantilever-shape. A gold (Au) weight is attached to the cantilever end in order to reduce the resonant frequency. Resonant oscillation is applied to the specimen by means of a piezoelectric actuator. In the experiment, no change appears in the specimen at low displacement range. However, the displacement range suddenly drops at 1.1×10^5 cycles of Δδ_2=16 nm (Δδ_2: deformation range at the base of specimen). After the decrease, fine slip bands with a width of 5 nm is observed in the Cu film. The critical resolved shear stress for the slip bands formation is approximately evaluated to be 400 MPa.
