Abstract
Sharp resonance response is important for many micrometer- and nanometer-scale resonators used in MEMS and NEMS. The purpose of the present paper is to numerically analyze thermoelastic damping of micro-scale resonators using the elastodynamic finite integration technique (EFIT) for coupling problems of elastodynamics and heat conduction. We analyze the damping behavior of a cantilever-type resonator for different aspect ratios. It is found that the peak magnitude of thermoelastic damping decreases for higher aspect ratio of the resonator. The numerical results are also compared to the theoretical prediction based on the Bernoulli-Euler beam theory.
