抄録
The drilling of microholes in brittle materials was carried out using diamond micropins fabricated by electrical discharge machining as micro-grinding tools. They can be employed because the convex parts of discharge craters formed on the tool surfaces serve as cutting edges of abrasive grains of grinding wheels. In drilling of crown glass by ultrasonic grinding using diamond tools, an increase in grinding force and the generation of cracks and chippings at the hole 〓s edges were suppressed owing to the high wear resistance of diamond. Drilling was successfully performed also in silicon, holes drilled in which are apt to have cracks and chippings at the edges, with proper drilling conditions.
