Development of micro FFM probe with gap control using electrostatic force

Abstract

Friction force microscopy (FFM) is widely used to clarify tribological properties on the micro and nano scale. On the other hand, lubrication at small gaps has attracted increasing attentions along with the recent progress of precision processing technology. When applying FFM to measurement of properties of lubrication at small gaps, gap control between the sliding probe and sample surface is indispensable. In this report, we propose a microprobe capable of controlling the gaps by embedding an electrostatic actuator in the probe.